Advanced Microscopy Applications
Micro Nano Fabrications

Micro sensor

Model: Lucent T model

Modes used – WLI

Thin films with different thicknesses have a signature in the reflectivity spectrum. Our 3d analytics software can analyse the interferogram data and obtain the corresponding spectrum. One application is in the characterization of a colour camera sensors. The RGB sensors have different film thicknesses to filter the required set of wavelengths. The Lucent T model is used in the WLI mode to capture the interferograms, which are used to reconstruct the surfaces. For a given point on the sample, the material (or film thickness) information is also estimated. The surface profile can be overlayed with the material data.