Advanced Microscopy Applications
Micro Nano Fabrications

Grating sample

Model: Lucent

Modes used – AFM, LSM

The AFM is a well known tool to characterize micro and nano scale features post fabrication. Gratings are commonly used in multiple applications. In the case of rectangular grating, Lucent AFM was used to measure the pillar height (100 nm), width (5 µm) and pitch (10 µm). The AFM provides precise dimensional information. It also identifies surface defects and roughness at the nanometer scale. A global view of the grating structure, the packing density and the particulate defects is well visualized at the mm scale with LSM.