Advanced Microscopy Applications
Micro Nano Fabrications

Ceramic device

Model: Lucent P model (upcoming)

Modes used - Profilometry

Space applications have very wide ranging requirements. One of the device holders had to be characterized for dimensions. The device holder was made of ceramic with feature sizes of > 10 mm,  tolerances in the µm range and had patterned metal deposition for electrical contacts. Our upcoming profilometry mode enabled such long range characterization and helped to create 3d map of a 10 mm x 10 mm x 1 mm ROI. WLI was used within the ROI to measure electrode roughness and grain size. If you have requirements that need a very large dynamic range – 10 mm to 1 nm, or have some specialized requirements, our engineering team is happy to assist.